发明名称 ROM device structure comprised of ROM memory array cells, featuring concave channel regions
摘要 A ROM device structure, featuring a ROM memory cell, with the ROM memory cell exhibiting a concave shaped, channel region, has been developed. The ROM device structure is comprised of heavily doped, N type, bit line regions, located in flat regions of the ROM device structure, while lightly doped, P type regions. comprise the concave channel region for the ROM memory cell. The ROM device structure offers self-alignment of the P type, concave channel regions, to the heavily doped N type, bit line regions.
申请公布号 US5990525(A) 申请公布日期 1999.11.23
申请号 US19970822666 申请日期 1997.03.24
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LIAO, SIU-HAN
分类号 H01L21/8246;H01L27/112;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113 主分类号 H01L21/8246
代理机构 代理人
主权项
地址