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发明名称
摘要
申请公布号
JP3158421(B2)
申请公布日期
2001.04.23
申请号
JP19900241404
申请日期
1990.09.12
申请人
发明人
分类号
H01L23/52;H01L21/3205;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L23/52
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