发明名称 SEMICONDUCTOR DETECTOR
摘要 PROBLEM TO BE SOLVED: To secure rapidness and accuracy in measurement by carrying a plurality of pieces of equipment, reducing the large work load in measurement operation for measuring the equivalent weight rate of spatial dose and surface contamination density by moving measurement points on site, and by arbitrarily measuring the equivalent weight rate of spatial rays and surface contamination density by one measuring instrument. SOLUTION: The semiconductor detector is obtained by dividing a semiconductor detector having an area required for measuring surface contamination density into a plurality of portions, performing wiring to each independent electrode at each divided section, integrating the plurality of divided sections for use and measuring the surface contamination density, and using the plurality of divided sections in one piece or independently and measuring the equivalent weight rate of spatial rays in this state.
申请公布号 JP2002350550(A) 申请公布日期 2002.12.04
申请号 JP20010156372 申请日期 2001.05.25
申请人 CHIYODA TECHNOL CORP;TODEN KOGYO CO LTD;SD GIKEN:KK 发明人 SATO NORIHITO;WATANABE HIROTSUNA;SAITO KAZUHIRO
分类号 G21C17/00;G01T1/16;G01T1/169;G01T1/24;G21F5/12;G21F9/00;H01L31/09;(IPC1-7):G01T1/24 主分类号 G21C17/00
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