VACUUM APPARATUS FOR FIXING WAFER

摘要

PURPOSE: A vacuum apparatus for fixing a wafer is provided to absorb stably the wafer regardless of a warpage phenomenon of the wafer by minimizing the physical force applied to the wafer. CONSTITUTION: A fixing table(130) includes an absorbing plate(132) in order to absorb a wafer(110) by using the vacuum. A vacuum forming cover(140) is used for defining a vacuum space(150) from an upper portion of the absorbing plate. The vacuum forming cover has a plurality of holes(120) for injecting the air(152) into the vacuum space. A wafer transferring arm(160) is used for transferring the wafer in order to adhere the wafer on the absorbing plate. The plural holes are formed on predetermined positions of the upper wall corresponding to an edge portion of a wafer adhered on the absorbing plate.