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发明名称
相变化型记忆体用溅镀靶、使用该溅镀靶所形成之相变化型记忆体用膜、及该靶之制造方法
摘要
本发明系关于,由3元系以上的元素组成、以择自锑、碲、硒元素中至少一成分作为主成分、且与目标组成的组成差异在±1.0at%以下之相变化型记忆体用溅镀靶,及使用该溅镀靶所形成之相变化型记忆体用膜。提供出相变化型记忆体用溅镀靶及其制造方法,可尽量减少偏析浓缩于记忆点与非记忆部的界面附近而构成重写次数减少原因的杂质、特别是影响结晶速度之杂质元素,同时减少靶成分相对于目标组成的偏差及成分偏析,以提升相变化型记忆体重写的特性以及结晶速度。
申请公布号
TW200303369
申请公布日期
2003.09.01
申请号
TW091135656
申请日期
2002.12.10
申请人
日材料股份有限公司
发明人
矢作 政隆;新藤 裕一朗;高见英生
分类号
C23C14/14
主分类号
C23C14/14
代理机构
代理人
林镒珠
主权项
地址
日本
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