| 摘要 |
PROBLEM TO BE SOLVED: To provide a magneto-electric conversion element, which prevents the deterioration of sensitivity of the element by suppressing the diffusion of metal to a semiconductor thin film and prevents the deterioration of a bond strength between an external terminal and an lead-out electrode. SOLUTION: When a protective film using a heat resistant resin is formed on the magneto-electric transformation device, the heat resistant resin is hardened at temperatures of 280°C or lower, at which the metal that composes short-circuit electrodes and lead-out electrodes of the element diffuses in less amount. As a result, the diffusion of the metal to the semiconductor thin film is suppressed to prevent the deterioration of sensitivity of the element. Also, the diffusion of metal under surface-layer to the surface metal layer is suppressed in the lead-out electrodes to prevent the degradation of bonding property or bond strength due to the deterioration of the surface metal in the lead-out electrodes. COPYRIGHT: (C)2004,JPO
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