| 摘要 |
PROBLEM TO BE SOLVED: To provide a slot rod for supporting substrate in which consumption of material can be reduced, and to provide a cassette for substrate employing the slot rod for supporting substrate. SOLUTION: In the slot rod for supporting substrate and the cassette for substrate employing the slot rod for supporting substrate, the slot rod for supporting substrate consists of a supporting rod and a metal rod, and the supporting rod is arranged with a plurality of supporting plates, at a constant interval, along one side of the body. The substrate cassette can contain glass substrates and since only the side part of the substrate touches protrusions of the supporting plates, possibility of generating dust, e.g. wear debris, through friction is reduced. Furthermore, since the supporting plates are provided only on one side of the body and do not have a circular structure surrounding the body, the consumption of material can be reduced greatly and the cost can also be reduced. COPYRIGHT: (C)2004,JPO |
