发明名称 Werkwijze en inrichting voor het nauwkeurig aanbrengen van structuren op een substraat.
摘要 A method wherein a substrate is provided, wherein, in a scanning step, structures already applied to the substrate are detected by at least one scanning provision of a processing head, wherein the processing head is provided with at least one lighting provision, which lighting provision locally lights the applied lacquer structure in a lighting step by using the information obtained with the scanning step. Further, an apparatus for carrying out the method is described, which apparatus is provided with a processing head which is which is movable relative to a substrate carrier, wherein the processing head comprises at least one scanning provision and at least one lighting provision.
申请公布号 NL1026880(C1) 申请公布日期 2005.10.25
申请号 NL20041026880 申请日期 2004.08.19
申请人 OTB GROUP B.V. 发明人 MARINUS FRANCISCUS JOHANUS EVERS;PETER BRIER;CORNELIS PETRUS DU PAU
分类号 B41J11/00;G03F7/20;H01L21/027;H05K1/02;H05K3/12 主分类号 B41J11/00
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