| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a microscope observation method capable of providing high resolution exceeding the capability of an imaging optical system of a microscope device. <P>SOLUTION: The microscope observation method comprises a measurement procedure of changing the illumination angle of a specimen 1, and measuring a complex amplitude distribution of each light wave that is individually generated on an imaging surface I by each light flux ejected from the specimen when the illumination angle is each value. The method comprises a calculation procedure of calculating the complex amplitude distribution of virtual light wave L' generated on the imaging surface when the imaging optical system 14 is replaced by a virtual imaging optical system 14' of which the number of openings is larger than that of the imaging optical system 14, based on the data of the complex amplitude distribution of each light wave. The method further comprises an image creating procedure of creating image data of a virtual image of the specimen formed on the imaging surface by the virtual imaging optical system, based on the complex amplitude distribution of the virtual light wave L'. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
