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发明名称
摘要
申请公布号	SU448253(A1)	申请公布日期	1974.10.30
申请号	SU19731869388	申请日期	1973.01.08
申请人		发明人
分类号	C23F1/00;(IPC1-7):C23F1/00;H01L19/00	主分类号	C23F1/00
代理机构		代理人
主权项
地址

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