| 发明名称 | Piezoelectric film producing process, vibrator element, vibrator, oscillator, electronic device, and moving object | ||
| 摘要 | A vibrator element includes: a base portion; and a vibrating arm extending from the base portion, the vibrating arm including a piezoelectric film that contains Cu at a crystal grain boundary. | ||
| 申请公布号 | US9461617(B2) | 申请公布日期 | 2016.10.04 |
| 申请号 | US201514727215 | 申请日期 | 2015.06.01 |
| 申请人 | SEIKO EPSON CORPORATION | 发明人 | Yamazaki Takashi;Iwamoto Osamu |
| 分类号 | H03B5/32;H01L41/18;H01L41/37;H03H9/17;C22C21/12;C23C14/06;C23C14/34;H01L41/09;H01L41/187 | 主分类号 | H03B5/32 |
| 代理机构 | Oliff PLC | 代理人 | Oliff PLC |
| 主权项 | 1. A vibrator element comprising: a base portion; and a vibrating arm extending from the base portion, the vibrating arm including a piezoelectric film that contains Cu at a crystal grain boundary. | ||
| 地址 | Tokyo JP | ||