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发明名称
METHOD AND DEVICE FOR INSERTING AND TAKING OUT OF HEAT TREATMENT JIG
摘要
申请公布号
JPS53129964(A)
申请公布日期
1978.11.13
申请号
JP19770044456
申请日期
1977.04.20
申请人
HITACHI LTD
发明人
AKIBA MASAKUNI;NAGATOMO HIROTO
分类号
C21D1/00;H01L21/22
主分类号
C21D1/00
代理机构
代理人
主权项
地址
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