Plasma processing apparatus

摘要

A plasma processing apparatus includes a processing chamber for processing a sample with a plasma, an RF power supply for generating the plasma within the processing chamber, an RF bias power supply for supplying RF bias power to a sample stage on which the sample is mounted, a pulse generation unit for creating first pulses for modulating the output from the RF power supply for generating the plasma and second pulses for modulating the output from the RF bias power supply, and a controller for providing control of the processing of the sample with the sample. The pulse generation unit creates the first pulses and the second pulses synchronized based on a pulse delay time transmitted from the controller. The pulse delay time is established to delay the second pulses relative to the first pulses.

主权项

1. A plasma processing apparatus comprising:
a processing chamber in which a sample is processed with a plasma; a first RF power supply for providing a first RF power to generate the plasma within the processing chamber; a second RF power supply for providing a second RF power to a sample stage on which the sample is mounted; a pulse generation unit including a control unit, a reference clock, a first pulse counter, and a second pulse counter; and a controller configured to control the pulse generation unit, wherein the control unit is configured to generate a first count value signal for generating the first pulse from the reference clock, a second count value signal for generating the second pulse from the reference clock, a first reset signal for resetting the first count value signal, and a second reset signal for resetting the second count value signal according to a frequency of a first pulse, a duty ratio of the first pulse, a frequency of a second pulse, and a duty ratio of the second pulse respectively, and a pulse delay time which is a delay time of the second pulse relative to the first pulse, which are sent from the controller, the reference clock being a pulse waveform providing a basis for generating the first pulse for modulating the first RF power and the second pulse for modulating the second RF power, wherein the first pulse counter is configured to generate the first pulse from the reference clock input thereto according to the first count value signal and the first reset signal, which are sent from the control unit, and wherein the second pulse counter is configured to generate the second pulse from the reference clock input thereto according to the second count value signal and the second reset signal, which are sent from the control unit.