RADIATION INSPECTING APPARATUS

摘要

In an X-ray inspecting apparatus, a rotational fluctuation amount of a stage is calculated around a power transmission part of the stage and a stage drive unit as a base point, i.e., the X-axis and Y-axis sliding parts, in accordance with detected positional information from a position detecting sensor. Then, a stage shift amount is calculated in accordance with the rotational fluctuation amount and a distance between the base point and an imaging position on the stage. Here, the stage shift amount corresponds to a positional deviation of the stage at the imaging position caused by an attitude variation of the stage in a yawing direction, and thus is an error in repeated positioning. Accordingly, a tomographic image with high resolution can be generated in consideration of the error in repeated positioning.

主权项

1. A radiation inspecting apparatus having a radiation source emitting radiation to an inspection object, a radiation detector detecting radiation passing through the inspection object to capture projection images, and a stage disposed between the radiation source and the radiation detector for supporting the inspection object placed thereon, the radiation inspecting apparatus comprising:
a stage drive unit moving the stage; a position detecting sensor detecting a position of the stage; a rotational fluctuation amount calculating unit calculating a rotational fluctuation amount of the stage around a power transmission part of the stage and the stage drive unit as a base point in accordance with detected positional information from the position detecting sensor upon imaging of the inspection object; a stage shift amount calculating unit calculating a stage shift amount in accordance with the rotational fluctuation amount and a distance between the base point and an imaging position on the stage, the stage shift amount representing a stage shift amount at the imaging position; and an image reconstructing unit correcting a positional deviation of the stage in accordance with the stage shift amount and reconstructing the projection images of the inspection object captured from various directions to generate a tomographic image.