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发明名称
SYSTEM FOR REACTIVE ION ETCHING
摘要
申请公布号
EP0047395(A3)
申请公布日期
1982.04.07
申请号
EP19810106090
申请日期
1981.08.04
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
HENDRICKS, CHARLES JOSEPH;HICKS, WILLIAM WALLACE;KELLER, JOHN HOWARD
分类号
H01L21/302;H01J37/32;H01L21/3065;(IPC1-7):H01L21/20
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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