| 摘要 |
PURPOSE:To enable easy correction of the deflection strain of charged beams by a method wherein the amount of deflection strain is reduced by varying the angle of incidence and the position of incidence of a beam going to a convergence lens to converge charged beams and to a deflector to deflect the beams. CONSTITUTION:The angle of incidence and the position of incidence of a charged beam going to the convergence lens 5 and to the deflectors 2 and 3 are varied, and marks at positions different with charged beams are successively scanned with the beams in the deflection field on a sample 7, then, at least one of the mark positions and mark distance is measured by detecting 12 the energy beam emitted out of the mark, thereby obtaining the amount of deflection strain of the charged beams. Thus, the angle of incidence and the position of incidence of the charged beams are set so that the amount of deflection strain decreases. This manner can set the position of incidence and the angle of incidence of the beams going to the deflectors 2 and 3 and to the convergence lens 5 in the optimum degree, resulting in marked reduction in deflector strain of the beams with the lens 5. |
