| 摘要 |
PURPOSE:To prevent defects due to invalid bonding operation, by detecting simultaneously any disengagement of the wire from a tool and disengagement from a clamp. CONSTITUTION:Distribution terminals of a power source 6 are connected to a clamp 2 and a horn 3a for supporting a tool 3 provided in a supersonic bonding apparatus. A wire 1 is supported by the clamp 2 and is inserted through a guide hole of the tool. When the inserted wire is contacted with the guide hole, a closed circuit is formed through this wire 1. A microcurrent detector 7 is provided in the circuit of the power source 6 so that microcurrent which is caused to flow by a potential difference between the tool 3 and the clamp 2 is detected through the wire 1. When a detection signal is detected, a holding device 8 is connected to the detector 7 for holding the signal for a given period of time. The holding device 8 determines, when the wire 1 inserted through the guide hole is removed from the guide hole in an instant, that the wire has been disengaged therefrom. |
