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发明名称
A METHOD FOR POLISHING SEMICONDUCTOR WAFERS WITH MONTMORILLONITE SLURRY
摘要
申请公布号
EP0103085(B1)
申请公布日期
1986.10.15
申请号
EP19830106147
申请日期
1983.06.23
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BASI, JAGTAR SINGH;MENDEL, ERIC
分类号
H01L21/304;C09G1/02;H01L21/306;(IPC1-7):H01L21/302
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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