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发明名称
摘要
申请公布号
JPS63106763(U)
申请公布日期
1988.07.09
申请号
JP19860201064U
申请日期
1986.12.27
申请人
发明人
分类号
C23C14/46;H01J37/32;(IPC1-7):C23C14/46
主分类号
C23C14/46
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