发明名称 Liquid in situ multiport monitoring system
摘要 A method and apparatus for determining the level of particulate contamination in a plurality of liquid sources. The apparatus comprises first and second control valves each having a number of valve elements equal in number to the number of liquid sources, with analytical equipment to determine the amount of particulate contamination in a fluid sample, disposed therebetween. Samples are withdrawn from and returned to the same liquid source. A common valve controller insures that the control valves are maintained at a common valve setting. The analytical equipment is capable of detecting particulate contaminants as small as 0.3 micron.
申请公布号 US4993271(A) 申请公布日期 1991.02.19
申请号 US19880283313 申请日期 1988.12.12
申请人 MICRON TECHNOLOGY, INC. 发明人 VARGASON, RICK D.
分类号 G01N1/10;G01N15/00;G01N15/06;G01N21/53 主分类号 G01N1/10
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