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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04171861(A)
申请公布日期
1992.06.19
申请号
JP19900299325
申请日期
1990.11.05
申请人
NEC CORP
发明人
NAKAMURA NORIO
分类号
H01L27/112;H01L21/8246
主分类号
H01L27/112
代理机构
代理人
主权项
地址
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