OPTO- LITHOGRAPHIC DEVICE COMPRISING A DISPLACEABLE LENS SYSTEM AND METHOD OF CONTROLLING THE IMAGING PROPERTIES OF A LENS SYSTEM IN SUCH A DEVICE,申请号EP19870201100-传众专利搜索

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发明名称	OPTO- LITHOGRAPHIC DEVICE COMPRISING A DISPLACEABLE LENS SYSTEM AND METHOD OF CONTROLLING THE IMAGING PROPERTIES OF A LENS SYSTEM IN SUCH A DEVICE
摘要
申请公布号	EP0250031(B1)	申请公布日期	1993.03.31
申请号	EP19870201100	申请日期	1987.06.11
申请人	N.V. PHILIPS' GLOEILAMPENFABRIEKEN	发明人	BOUWER, ADRIANUS;VAN DE LOOY, GUIDO
分类号	G02B7/09;G02B7/28;G03B13/36;G03F7/20;G03F7/207;H01L21/027;H01L21/30	主分类号	G02B7/09
代理机构		代理人
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