TARGET FOR ULTRAVIOLET LIGHT GENERATION, AND METHOD FOR MANUFACTURING SAME

摘要

A target (20A) for ultraviolet light generation is provided with: a sapphire substrate (21) for transmitting ultraviolet light (UV); an intermediate layer (22) for transmitting ultraviolet light (UV), the intermediate layer (22) containing oxygen atoms and aluminum atoms in the composition thereof, and the intermediate layer (22) being in contact with the sapphire layer (21); and a light-generation layer (23) for receiving an electron beam (EB) and generating ultraviolet light (UV), the light-generation layer (23) being provided on the intermediate layer (22) and containing oxide crystals that contain rare earths to which an activator agent is added.