An integrated accelerometer.

摘要

An integrated accelerometer includes hinges (12, 14) of silicon composition for securing strut legs of a pendulous mass (16) to the accelerometer body (20). Both the body of the accelerometer and the pendulous mass are of metal-coated compositions. Metallized pads (44, 46, 48) are provided on selected surfaces of the hinges for forming eutectic bonds with the body and struts of the pendulous mass of the accelerometer. A heavily-doped continuous region (36) adjacent the surface of the hinge connects the eutectic bonds through a flexure region of reduced thickness to complete necessary device circuitry. <IMAGE>