| 摘要 |
<p>A device for driving movable blades (BL1, BL2) which limit an illuminated region (IAR) on a reticle is composed of linear motors (43A, 43B). Therefore, the vibration due to eccentricity will not occur as opposed to the conventional rotary motor. This eliminates one of the major causes of vibration of the device, resulting in improved accuracy of alignment. Since linear motors (43A, 43B) drive the blades (BL1, BL2) in the direction corresponding to the synchronous movement of the reticle (R) and wafer (W), the linear motors do not cause vibration when the blades move at constant speed. Therefore, even if the thrust of the linear motors is increased as a high-speed reticle stage (RST) is required, vibration is not generated during synchronous movement, thereby improving the speed of synchronous movement of the reticle (R) and the wafer (W) and thus throughput.</p> |
