| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact spark gap switch capable of stably generating a high-voltage and high-frequency pulse voltage over a long time. SOLUTION: In a spark gap switch 12 in a pulse generating circuit 2 of a plasma generation device T, an intermediate electrode 15 which is not connected to a power supply is provided in a substantially intermediate position between a first ball electrode 13 and a second ball electrode 14 with a fixed spark gap left by each of the two ball electrodes 13, 14, and switching is performed between the two ball electrodes 13, 14 by generating spark discharge in two stages, in the first spark gap between the first ball electrode 13 and the intermediate electrode 15, and in the second spark gap between the intermediate electrode 15 and the second ball electrode 14, and thus a high-voltage and high-frequency pulse voltage is generated stably over a long time, while the spark gap switch 12 is made compact.
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