| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device capable of improving in-plane soaking properties of a holder by taking effective measures related to heat escape from the holder to a cylindrical support.SOLUTION: A heating device 11 comprises a ceramic holder 21 and a ceramic cylindrical support 31. The holder 21 includes a principal surface 22 on which a processed base material 15 is mounted and a rear surface 23, and is embedded with a resistance heating element 25. An end surface 32 of the cylindrical support 31 is joined to the rear surface 23 of the holder 21. An air gap 41 is formed in a junction portion B1 between the holder 21 and the cylindrical support 31. The resistance heating element 25 in the holder 21 is laid through a position directly above a portion B2 joined to the rear surface 23 in the end surface 32.SELECTED DRAWING: Figure 1 |
