| 发明名称 |
COATING LIQUID FOR FORMING SILICA BASED COATING |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating liquid for forming a silica based coating of low permittivity. SOLUTION: A silica based coating having permittivity not higher than 3.2 can be formed on a substrate by adding one kind selected from (a) a condensate obtained by subjecting trialkoxy silane to hydrolysis in an organic solvent under an acid catalyst, and (b) polyalkylene glycol and its end alkylate and a low permittivity can be attained.
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| 申请公布号 |
JP2002319582(A) |
申请公布日期 |
2002.10.31 |
| 申请号 |
JP20020031182 |
申请日期 |
2002.02.07 |
| 申请人 |
TOKYO OHKA KOGYO CO LTD |
发明人 |
FUJII YASUSHI;MATSUSHITA ATSUSHI |
| 分类号 |
H01L21/768;H01L21/312;H01L21/316;(IPC1-7):H01L21/312 |
主分类号 |
H01L21/768 |
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