发明名称 |
Dispenser apparatus and associated method of heating |
摘要 |
An apparatus for dispensing liquids onto a rotating surface. In one embodiment the apparatus includes one or more dispense lines, each dispense line having a tube and a tubular fitting connected to a nozzle. In another embodiment the apparatus includes a heat exchanger providing circulation of a heat transfer medium between the annular regions defined by the tubes inside the dispense lines through a fluid channel in communication with the annular regions. A method of heating a dispense line. The method includes the steps of flowing a heating medium through the annular region of one dispense line to another through a fluid channel in communicating with the annular regions.
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申请公布号 |
US6494953(B2) |
申请公布日期 |
2002.12.17 |
申请号 |
US20010769856 |
申请日期 |
2001.01.25 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
HAYES BRUCE L.;PECKHAM MARK V. |
分类号 |
B05B1/24;B05B9/00;B05B15/02;B05C11/08;G03F7/16;G03F7/30;G03F7/42;(IPC1-7):B05C13/00;B05B15/00 |
主分类号 |
B05B1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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