发明名称 WORK POSITIONING DEVICE
摘要 <p>A work positioning device which has an image processing means (40B) for determining, for specified positioning measures (M1, M2) ((G1, G2), (N1, or N2), (k1, k2)), actually measured values (CD1, CD2) ((GD1, GD2), (ND1, or ND2), (KD1, KD2)) and reference values (CR1, CR2) ((GR1, GR2), (NR1, or NR2), (KR1, KR2)), and which moves a work (W) for positioning to a specified position so that the actually measured values (CD1, CD2) ((GD1, GD2), (ND1, or ND2), (KD1, KD2)) agree with the reference values (CR1, CR2) ((GR1, GR2), (NR1, or NR2), (KR1, KR2)). .</p>
申请公布号 WO2003000439(P1) 申请公布日期 2003.01.03
申请号 JP2002006036 申请日期 2002.06.18
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