发明名称 Probe tip configuration and a method of fabrication thereof
摘要 A probe tip configuration, being part of a probe (FIG. 2) for use in a scanning proximity microscope, is disclosed, comprising a cantilever beam (1) and a probe tip. Said tip comprises a first portion of a tip (2) and at least one second portion of a tip (5). Said first portion of a tip is connected to said cantilever beam whereas said second portion of a tip is placed on said first portion of a tip. Cantilever beam, first portion of a tip and second portion(s) of a tip can be composed of different materials and can be isolated each from another which makes an easy adjustment of the maximum penetration depth of the tip possible without limiting the resolution and makes it also possible to detect more than one signal of a sample at the same time using one cantilever beam. Methods of making the probe tip configuration are further described.
申请公布号 US6504152(B2) 申请公布日期 2003.01.07
申请号 US20010005446 申请日期 2001.12.03
申请人 IMEC VZW 发明人 HANTSCHEL THOMAS;VANDERVORST WILFRIED
分类号 C23F1/00;G01B7/34;G01N23/00;G01N27/00;G01Q70/08;G01Q70/10;G01Q70/16;G01R1/067;H01L21/302;(IPC1-7):G01N23/00 主分类号 C23F1/00
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