| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope by which surface physical properties of a plurality of samples are measured without dispersion and by which physical properties of a plurality of measuring sample components are measured simultaneously without dispersion. SOLUTION: The scanning probe microscope comprises a cantilever having a very small probe at its tip, and the surface property of each sample is measured. A calibration sample and each measuring sample are installed side by side, its physical property is measured on the calibration sample when a deposit does not exist on the probe, each measuring sample component is stuck to the probe on the measuring sample, the probe is moved to the calibration sample, and the physical property of each measuring sample component stuck to the probe is measured on the calibration sample. A plurality of sample components are dispersed independently on the calibration sample so as to be measured, and the physical properties of the plurality of measuring sample components stuck to the calibration sample are measured and compared. COPYRIGHT: (C)2003,JPO
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