| 发明名称 |
METHOD AND COMPOSITION FOR REMOVING SODIUM-CONTAINING MATERIAL FROM MICROCIRCUIT SUBSTRATES |
| 摘要 |
A method and composition for removing sodium-containing materials such as photoresist from microcircuit substrate material utilizes 1,2-Diaminocyclohexanetetracarboxylic Acid in an organic solvent. |
| 申请公布号 |
PL357383(A1) |
申请公布日期 |
2004.07.26 |
| 申请号 |
PL20010357383 |
申请日期 |
2001.03.19 |
| 申请人 |
MALLINCKRODT BAKER INC. |
发明人 |
SCHWARTZKOPF GEORGE |
| 分类号 |
C11D7/24;C11D7/32;C11D7/34;C11D7/50;C11D11/00;G03F7/42;H01L21/027;H01L21/304;H01L21/311 |
主分类号 |
C11D7/24 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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