| 摘要 |
<p>Provided are a piezoelectric actuator for an inkjet printhead and a method of forming the same. The piezoelectric actuator includes: a lower electrode (141) formed on a flow path plate (110) with a pressurizing chamber (111); a bonding pad (144) formed on the flow path plate to be insulated from the lower electrode, wherein a driving circuit (151) for voltage application is bonded to an upper surface of the bonding pad; a piezoelectric layer (142) formed on the lower electrode correspondingly to the pressurizing chamber, wherein an end of the piezoelectric layer extends onto the bonding pad; and an upper electrode (143) formed on the piezoelectric layer, wherein an end of the upper electrode extends so that it exceeds the end of the piezoelectric layer and contacts with an upper surface of the bonding pad. Therefore, the area of the piezoelectric layer decreases, thereby increasing the response speed of the actuator. Furthermore, the driving circuit for voltage application can be firmly and stably connected to the actuator by an easy process. <IMAGE></p> |
