| 摘要 |
Two relatively movable, spaced elements having electrostatically coupled sets of uniformly spaced interdigitated electrodes form a precision, high gain linear or angular position-measuring transducer. Coupling electrodes on one element capacitively couple to portions of the electrodes on the other element so that electrical connections to external excitation and detection circuitry need be made to only one of the two elements. The shape and dimensions of the electrodes can be arranged to reduce or eliminate undesired impedance variations, capacitive coupling and unwanted harmonic coupling wave frequency components. |
