摘要 |
One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator. |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
LU, Guang;ALPAY, Mehmet;TYLER, Mike;XU, Qian;KLEINERT, Jan;LIN, Zhibin;BROOKHYSER, Jim;LO, Ho, Wai;EATON, Kurt, M. |