SELF-SUPPORTING FILM, SELF-SUPPORTING STRUCTURE, METHOD FOR MANUFACTURING SELF-SUPPORTING FILM, AND PELLICLE

摘要

Provided is a self-supporting film that has an anti-reflection function independently, so that the self-supporting film exhibits excellent optical characteristics as a result. A self-supporting film has a rugged-structure layer having periodic rugged shapes formed on a surface thereof, with these periodic rugged shapes being formed on at least one surface. The average thickness of the self-supporting film ranges from 0.2 μm to 20.0 μm. The rugged-structure layer has a yield strain of 1% or greater and a tensile elongation of 10% or greater.

主权项

1. A pellicle having a frame body, a pressure-sensitive adhesive agent that is applied onto one end face of the frame body, and a self-supporting film bonded to the other end face of the frame body,
wherein the self-supporting film has a rugged-structure layer in which periodic rugged shapes are formed on at least one face, and wherein the pellicle has the rugged-structure layer on an inner face side and/or an outer face side of the self-supporting film.