| 摘要 |
PURPOSE:To attain safely and efficiently, accurate data, by providing a vessel part placed above a device, a pressurizing and change measuring part connected to this vessel part, a driving system provided under the device, an exhaust system, etc. CONSTITUTION:The vessel part is constituted with an outside vessel 2, an inside vessel 3, a basket 3a, etc. shown in a figure 1 and a figure 2 and includes an outside cover 4, which is opened and closed by a hinge 4a and has a double structure, and is placed above the device. The inside vessel 3 is connected to a vacuum pump 11 by a vacuum exhaust piping 11a, and the vacuum exhaust piping 11a of the outisde vessel 2 is connected to the exhaust system at the rear of the device. By this constitution, accurate data is attained safely and efficiently. |
