| 摘要 |
PURPOSE:To perform high-sensitivity inspection efficiently by guiding inspection light from an end part of a cylindrical body into the inspection area inside of a cylinder wall. CONSTITUTION:The inspection light from a light source 30 is admitted from the end part of the transparent cylindrical body 10 to the cylinder wall and then guided into the area I. The area I is photographed by an image sensor 100 and a scatter of the inspection light due to a defect is detected by the video signal of the sensor to inspect the cylindrical body 10. Therefore, the defect is detected with high sensitivity without any background light originating from the inspection light, so data processing necessary for the defect detection is facilitated to obtain a system having a fast inspection speed. |
