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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH01276554(A)
申请公布日期
1989.11.07
申请号
JP19880105927
申请日期
1988.04.28
申请人
TERU BARIAN KK
发明人
KANEZASHI TADAMASA;AMIKURA MANABU
分类号
H01J37/18;H01L21/265
主分类号
H01J37/18
代理机构
代理人
主权项
地址
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