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发明名称
摘要
申请公布号
JPH0159603(B2)
申请公布日期
1989.12.19
申请号
JP19790124964
申请日期
1979.09.28
申请人
NIPPON ELECTRIC CO
发明人
KITAMURA YOSHINARI
分类号
G05F3/24;G05F1/56;G05F1/618;G11C11/407;H01L21/822;H01L27/02;H01L27/04;H01L27/06
主分类号
G05F3/24
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