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发明名称
METHOD FOR FORMATION OF AN ISOLATING OXIDE LAYER
摘要
申请公布号
CA2008499(A1)
申请公布日期
1990.12.22
申请号
CA19902008499
申请日期
1990.01.24
申请人
KALNITSKY, ALEXANDER
发明人
KALNITSKY, ALEXANDER;TAY, SING P.;ELLUL, JOSEPH P.;ABBOTT, ROGER S.
分类号
H01L21/32;H01L21/762
主分类号
H01L21/32
代理机构
代理人
主权项
地址
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