Multi-dimensional high-resolution probe for semiconductor measurements including piezoelectric transducer arrangement for controlling probe position

摘要

A probe which is positioned in at least one axis by a piezoelectric transducer is provided. One or more piezoelectric transducers control position of the probe with respect to another probe, with respect to a sample surface, or with respect to a previous position of the probe itself. A method for measuring spreading resistance is provided where the distance between two probes is reproducibly controlled in the range of a few angstroms by measuring tunneling current between the two probes, and electrical contact between the two probes and a sample is reproducibly provided by monitoring current between the probes and the sample.