FILM-FORMING DEVICE FOR SEMICONDUCTOR DEVICE,申请号JP19940133626-传众专利搜索

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发明名称	FILM-FORMING DEVICE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH07321057(A)	申请公布日期	1995.12.08
申请号	JP19940133626	申请日期	1994.05.23
申请人	NIPPON STEEL CORP	发明人	HORINOUCHI NORIHITO
分类号	C30B25/14;H01L21/205;H01L21/31;(IPC1-7):H01L21/205	主分类号	C30B25/14
代理机构		代理人
主权项
地址

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