Positivarbeitende Resistzusammensetzung,申请号DE19926013996T-传众专利搜索

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发明名称	Positivarbeitende Resistzusammensetzung
摘要
申请公布号	DE69213996(T2)	申请公布日期	1997.05.22
申请号	DE19926013996T	申请日期	1992.04.24
申请人	SUMITOMO CHEMICAL CO., LTD., OSAKA, JP	发明人	UETANI, YASUNORI, TOYONAKA-SHI, OSAKA-FU, JP;DOI, YASUNORI, TAKATSUKI-SHI, OSAKA-FU, JP;HASHIMOTO, KAZUHIKO, IBARAKI-SHI, OSAKA-FU, JP;OSAKI, HARUYOSHI, TOYONAKA-SHI, OSAKA-FU, JP;HANAWA, RYOTARO, IBARAKI-SHI, OSAKA-FU, JP
分类号	G03F7/004;G03F7/022;(IPC1-7):G03F7/004	主分类号	G03F7/004
代理机构		代理人
主权项
地址

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