发明名称 |
METAL ION REDUCTION METHOD OF AMINO-CHROMATIC CHROMOPHORES AND THEIR USE IN THE SYNTHESIS OF LOW METAL BOTTOM ANTI-REFLECTIVE COATINGS FOR PHOTORESISTS |
摘要 |
PURPOSE: Described are a process for producing bottom anti-reflective coating compositions having a very low level of metal ions utilizing specially treated anion exchange resins, and also a method for producing semiconductor devices by producing photoimages on a substrate using such bottom anti-reflective coating compositions. CONSTITUTION: The formation process of bottom anti-reflective coating composition comprises the steps of making a solution of an aminoaromatic chromophore in an electronic grade casting solvent; adding an electronic grade polar solvent to make a homogenous solution; reacting the low metal solution and a polymer with an anhydride group at a temperature between about 120 to 160°C for about 6-8 hours; and adding deionized water to the reaction product, stirring for about 30-90 minutes, decanting the water layer, distilling to remove residual water and thereby producing a bottom anti-reflective coating composition having levels of sodium and iron ions less than 100 ppb each.
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申请公布号 |
KR20000016471(A) |
申请公布日期 |
2000.03.25 |
申请号 |
KR19987010055 |
申请日期 |
1998.12.05 |
申请人 |
CLARIANT INTERNATIONAL LTD |
发明人 |
RAHMAN, M., DALIL;HANNIGAN, TIMOTHY, T.;LYNCH, THOMAS, J. |
分类号 |
H01L21/027;C08F216/20;G03F7/004;G03F7/09;G03F7/11;G03F7/38;G03F7/40;H01L31/0216;(IPC1-7):G03F7/09;H01L31/021 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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