SUBSTRATE TRANSPORT APPARATUS

摘要

A substrate transport apparatus (10) comprising a drive section (27) and a robot transport arm (25). The robot transport arm (25) is mounted to the drive section (27). The robot transport arm (25) has a wrist (42) and an end effector (44) to hold the substrate thereon. The end effector (44) is rotatably mounted to the wrist (42) to rotate about the wrist (42). The rotation of the end effector (44) about the wrist (42) is slaved to the robot transport arm (25). The robot transport arm (25) is adapted to transport substrates into and out of two general side-by-side orientated substrate holding areas (26L, 26R) with the drive section (27) being located in only one location relative to the two holding areas (26L, 26R).