发明名称 Method and apparatus for measurement of weight during CVI/CVD process
摘要 <p>This invention is in the field of Chemical vapor infiltration and Chemical vapor deposition (CVI/CVD). More specifically, this invention is directed to method and apparatus for weighing parts being subjected to the CVI/CVD process, during the process itself to indicate a weight change thereof. The process may be terminated or altered as desired based upon the weight gain information. &lt;IMAGE&gt;</p>
申请公布号 EP0995813(A2) 申请公布日期 2000.04.26
申请号 EP19990120704 申请日期 1999.10.19
申请人 THE B.F.GOODRICH CO. 发明人 RUDOLPH, JAMES W.
分类号 C23C16/52;C23C16/04;(IPC1-7):C23C16/04;C04B41/00 主分类号 C23C16/52
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