发明名称 Device for position alignment of semiconductor material discs, comprising cassette with grooves, roller engaging discs by contact with edge, and means for lessening contact pressure
摘要 The device for orientation or alignment of discs (2) of semiconductor material as e.g. silicon, germanium, or compounds III-IV, comprises a holder in the form of cassette (1) with a set of grooves (5), a base (11) with roller (18) engaging discs by contact of edge with envelope, and means for variation, in particular for decreasing the contact pressure of discs on the roller and the walls (3,4) of cassette in the process of alignment by rotation. The means for lessening the contact pressure include a projection (43) engaging a notch (42) for locking in position the cassette (1) and the base (11) so that the discs are supported by peripheral parts of active sides, i.e. those carrying microcircuits, against the surfaces of grooves. The means are also integrated in the structure of the roller (18) and bearings (16) for guiding its rotation, which can be eccentric. The external surface (30) of roller (18) can be cylindrical or body sectioned, and the cross-section can be non circular, polygonal or oval. The cross-section of roller can comprise a part which is rectilinear, parabolic or elliptic. The roller can be with a helical threading, in the form of a screw-shaft. The cassette (1) with grooves is inclined with respect to horizontal at an angle (21), which is in the range e.g. 1-10 deg., so that the discs are supported by peripheral parts of active sides, the inactive sides not held in contact with the walls.
申请公布号 FR2785886(A1) 申请公布日期 2000.05.19
申请号 FR19980014500 申请日期 1998.11.13
申请人 CYBERNETIX RECHERCHE 发明人 JAMES JEAN
分类号 H01L21/68;(IPC1-7):B65G49/07 主分类号 H01L21/68
代理机构 代理人
主权项
地址