| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm chuck which can prevent a diaphragm from being deteriorated caused by heat and is miniaturized and to which a jaw member can be attached with ease. SOLUTION: This diaphragm chuck holds a workpiece by means of a jaw member 33, which is attached to a chuck body, and releases the workpiece by deforming a diaphragm. In this case, the jaw member 33 is formed into a truncated pyramid shape, and the chuck body is provided with a mounting hole 35 of a nearly truncated pyramid shape corresponding to the shape of the jaw member 33, and the mounting hole 35 has a cutout section on the workpiece holding side, and with the corner section 33a of the jaw member 33 protruded on the workpiece holding side, the jaw member 33 is fitted into the mounting hole 35 and is fixed to the chuck body through a screw 37.
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